MEMs Enabled Smart Sensor Manufacturing




7:30 pm Registration and Morning Coffee

Plenary Session

8:00 am Chairperson's Remarks

Craig Wohlers, Executive Director, Conferences, Cambridge Innovation Institute

8:10 AI to the Rescue: Curing and Augmenting Brain Capabilities with the Smart Kiwi Nano-Implant

Newton Howard, PhD, Professor Neurocomputation and Neurosurgery, Brain Sciences Foundation, Oxford University; Chairman, Board of Directors, ni2o

Brain Computer Interface technologies are in constant improvement with interaction modalities ranging from non-invasive (EEG, TMS, etc.) to chronically implanted devices. We are presenting here Kiwi, a novel, minimally invasive micro-implant using nanotechnologies to record the electrical activity of neural tissue and stimulate using electrical and optical stimulation modalities. Kiwi micro-implant is operating wirelessly and is coupled to a cutting-edge AI module providing the possibility to detect in real-time neural activity patterns and adjust the stimulation parameters accordingly. This adaptative, minimally invasive and smart BCI opens a new way for personalized therapeutic applications in numerous diseases such as neurodegenerative diseases (Parkinsons, Alzheimers, etc.), mental illnesses (depression, anxiety, etc.) or chronic pain, brain augmentation, and research device.

8:35 PANEL DISCUSSION: Sensor Mergers & Acquisitions: Models for Success and Lessons from Failures

Panel Moderator:

Moderator: Andy Gilicinski, Global Vice President, Research Development & Engineering, Mergers and Acquisitions, SC Johnson & Son

This panel discussion will examine the current landscape of mergers and acquisitions with the sensors and device space. Our panel of experts will discuss the current outlook within the marketplace and will examine past success and failures and how the pitfalls of failure can be avoided.

9:25 Coffee Break in the Exhibit Hall with Poster Viewing

MEMS Manufacturing Scalability

9:55 Chairperson's Remarks

Roger Grace, President, Roger Grace Associates

10:00 Bulk Acoustic Wave Resonators for Size Reduction in Wireless Microcontroller Units

Jeronimo Segovia-Fernandez, R&D Systems Engineer, Texas Instruments

Bulk Acoustic Wave (BAW) resonators enable high performance, timing-accurate oscillators, which when integrated into the MCU package eliminate the need for bulky external crystals without compromising power, latency or frequency stability. In this talk, I will describe how BAW works, the advantages of adopting this technology in wireless MCUs providing smaller footprints, better cost optimization and more robust designs, and give some guidelines on what aspects of BAW are currently investigated to further enhance resonator performance.

10:30 Scalable Manufacture of CNT-Based Microsensor for Lactate Detection in Sweat

Ahmed Busnaina, PhD, William Lincoln Smith Professor, Distinguished University Professor and Director, NSF Nanoscale Science and Engineering Center for High-Rate Nanomanufacturing, Northeastern University

Non-invasive detection of lactate can help identify hypoxia and exercise-induced muscle fatigue in addition to several other morbidities. To address this gap, we present a novel chemiresistor-like amperometric carbon nanotube (CNT) enabled flexible lactate sensor with a focus on manufacturability and scalability. Sensors are printed using directed assembly of CNTs that are enzymatically functionalized for lactate detection. The sensors are capable of detecting L-lactate with excellent sensitivity (300 µA mM-1 cm-2) and short response time (

11:00 Building Next-Generation Neural Interfaces Using Nanoscale Manufacturing

Ingrid van Welie, Founder and CEO, Neural Dynamics Technologies LLC

Neurological disease is projected to be the second largest cause of chronic disease in coming decades, but to confront this development, we need a better understanding of the neural circuit activity that underlies both healthy as well as diseased brain function. To understand the function of dynamical neural circuits we need technologies with the capability to measure the activity of many individual neurons in vivo, in intact brains. Neural Dynamics Technologies focuses on the development of new neural interfaces that can record the activity of hundreds to thousands of neurons simultaneously within and across brain regions that will be available at low cost and that offer customizability and compatibility with existing hardware and analysis methods. We use a combination of CMOS and Ebeam lithography to develop devices that have hundreds to thousands of individual recording sites and we are working on integrating stimulation, optical and fluidic capabilities onto our devices.  

11:30 MEMS Sensors: The Path to Mass Production

Paul Pickering, CRO, Micralyne; President and Principle Consultant, Alpine Teschle

The adoption of sensors over the last 20 years into numerous, high value markets like automotive, healthcare and mobile handsets has stimulated an unprecedented R&D investment in new devices to address the varied needs in the market.   The future looks very bright for the continued growth in the market and the opportunity to design sensors into new applications is very broad.   Traditionally, the development process from concept to mass production has been a “long and winding road” with significant production uncertainties about the critical performance aspects of the device, test methods and reliability.  This presentation will provide a successful framework for the productization of sensors in various market segments.  This approach to productization is the result of more than 20 years of manufacturing experience in various MEMS fabs.  The objective of this presentation is to provide a proven set of best practices and recommended approaches for sensor development, characterization, productization and release to production for MEMS based sensors.  Using these practices can accelerate the development, improve production yields and smooth the path to mass production.    

12:00 Sponsored Presentation (Opportunity Available)

12:30 Enjoy Lunch on Your Own

Flexible Substrate Sensor Integration

1:25 Chairperson's Remarks

Ahmed Busnaina, PhD, William Lincoln Smith Professor, Distinguished University Professor and Director, NSF Nanoscale Science and Engineering Center for High-Rate Nanomanufacturing, Northeastern University

1:30 Paper, Plastic and Fabric: Emerging Platforms for Sensors and Sensor-Based Systems for Emerging Applications

Roger Grace, President, Roger Grace Associates; Vice President Americas, MANCEF (Micro and Nanotechnology Commercialization Education Foundation)

The presentation will provide an overview of printed, flexible, stretchable, functional fabric sensors and accompanying electronics and the applications in the biomed sector that they are currently enabling as well as their future application opportunities.   Examples from current suppliers as well as highlights from leading international research organizations will be addressed.  In addition to these sensors, we will also address the challenges of their integration with other functional element of basic Internet of Things (IoT) and wearable applications.   We will also address the manufacturing issues to create these heterogeneous and hybrid solutions from both a batch mode and continuous process.  Concluding presentation topics include barriers to the successful commercialization and recommended strategies for monetization opportunities of these technologies.

Next-Generation Design and Engineering for MEMS Applications

2:00 Sensor Fusion for Self-Navigating Cars Using Inertial MEMS and Odometry

Igor Prikhodko, PhD, MEMS Design Engineer, Analog Devices

We demonstrate inertial navigation for automobiles with position accuracy reaching GPS-like accuracies using a tactical-grade Inertial Measurement Unit (IMU) for direction estimation and a speedometer for velocity estimation. The navigation module fuses inputs from the IMU, On-Board Diagnostics, and GPS to provide a vehicle trajectory estimate in real-time. Based on field tests the position error was 30 centimeters after 5 minutes of drive without GPS.

2:30 Recent Developments in Patient Monitoring, MEMS-Based Drug Screening, and Transdermal Drug Delivery

Ashish V. Pattekar, Principal Scientist, PARC, a Xerox Company

This talk will provide an introduction into our work on patient monitoring at hospitals for improved healthcare delivery and reducing post-discharge hospital admissions and share recent results from ongoing efforts developing MEMS / microfluidics based technologies for High-throughput drug screening (HTS) and Transdermal drug delivery.

3:00 Refreshment Break in the Exhibit Hall with Poster Viewing

3:30 Time-Domain Sensor and System Simulations: Enabling Digital Twin and IoT Development

Mihir S. Patel, PhD, Director of Engineering, OnScale

4:00 Design Challenges and Modeling of MEMS Based Sensor Products

Mary Ann Maher, PhD, Founder & CEO, SoftMEMS

Many of the challenges now seen in bringing MEMS based products to market are occurring as MEMS and companion integrated circuits are combined into systems often on flexible substrates. Current products are increasing in system complexity and often include multiple sensors with special purpose hardware for running sensor fusion and AI algorithms such as neural networks. This talk will cover the challenges and opportunities for designing innovative MEMS systems particularly focusing on the Integrated circuit/MEMS/Package/Substrate co-design and optimization issues. It will further discuss modeling and simulation of MEMS beginning with detailed sensor design and ending with using the sensor data to drive AI algorithms for IoT based applications. Examples of design issues and their solutions utilizing computer-aided design tools (CAD)  are given. Finally, a perspective on the future design, standards, and ecosystem needs in the MEMS industry as new types of sensors and actuators in the bio/chemical and flexible/stretchable/printed technologies are rolled out is also presented.

4:30 Stretchable Hybrid Sensor System Constructions Based on a Novel Thermosetting Polymer System

Takatoshi Abe, Engineer, Electronics Materials, Panasonic Industrial Devices

Sensor systems for printed and wearable electronics are an area of active research. Current technology based on polymer materials like polyester or thermoplastic polyurethane technology face severe assembly and end-use challenges because of their low temperature tolerances and permanent plastic deformation tendency. Researchers with Panasonic Electronic Materials Division are been developing new materials based on a unique stretchable thermosetting polymer. This presentation will introduce these materials and examples of sensor system constructions based on this technology.

5:00 Close of Summit

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